ONE ROLE OF TITANIUM COMPOUND PARTICLES IN ALUMINUM NITRIDE SINTERED BODY

Microstructure of titanium compound particle in polycrystalline alumin ium nitride (AIN) has been investigated using micro-auger electron spe ctroscopy (mu-AES). AIN-0.5 wt % TiO2-1.5 wt % Y2O3-0.4 wt % CaO syste m was sintered at 1850 degrees C in nitrogen atmosphere using a graphi te furnace. The AES studies show that the composition of the titanium compound particle is titanium, aluminium, carbon, oxygen, nitrogen and calcium. On the other hand, no calcium is observed by AES in the AIN grains and grain boundary. It is found that one role of the titanium c ompound particle is to trap calcium included in polycrystalline AIN.