A magnetoplumbite type of hexagonal ferrite films with composition of BaAl2
Fe10O19 were deposited using Facing Targets Sputtering (FTS) apparatus on S
iOx/Si wafers with Pt seed layers to promote the c-axis orientation perpend
icular to the film plane. Then, the films were post-annealed at 900 degrees
C in air. With the increase of Al content, saturation magnetization decrea
sed, but coercivity and perpendicular squareness increased. The BaAl2Fe10O1
9 films with coercivity of 3.4 kOe and perpendicular squareness as high as
0.88 were prepared. (C) 1999 Elsevier Science B.V. All rights reserved.