Torque evaluation of a LIGA fabricated electrostatic micromotor

Authors
Samper, VD Sangster, AJ Reuben, RL Wallrabe, U
Citation
Vd. Samper et al., Torque evaluation of a LIGA fabricated electrostatic micromotor, J MICROEL S, 8(1), 1999, pp. 115-123
Citations number
24
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
ISSN journal
10577157 → ACNP
Volume
8
Issue
1
Year of publication
1999
Pages
115 - 123
Database
ISI
SICI code
1057-7157(199903)8:1<115:TEOALF>2.0.ZU;2-5
Abstract
The dynamic analysis of a twin stator electrostatic wobble motor is present ed incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual device s is then examined and a solution is described which allows the evaluation of torques smaller than 10(-7) Nm without affecting the wobble motion of th e device. Theoretical and practical results for actual devices are compared . [308].