A study on the chemical spray deposition of zinc oxide thin films and their structural and electrical properties

Undoped zinc oxide films have been prepared by chemical spray pyrolysis tec hnique. X-ray diffraction studies have shown polycrystalline nature of the films with a hexagonal wurzite type structure. The preferential orientation of the film is found to be sensitive to substrate temperature. Annealing i n vacuum has reduced the resistivity of the films and the lowest value obta ined was 3.15 x 10-3 Omega m. The optical transmittance of the films in the visible region was found to be better than 95% in the near-infrared and vi sible region. (C) 1999 Elsevier Science S.A. Ail rights reserved.