An average filling factor of one atom per lattice site has been obtained in
a submicron scale far-off-resonance optical lattice (FORL). High site occu
pation is obtained through a compression sequence that includes laser cooli
ng in a 3D FORL and adiabatic toggling between the 3D FORL and a 1D FORL tr
ap. After the highest filling factor is achieved, laser cooling causes coll
isional loss from lattice sites with more than one atom. Ultimately 44% of
the sites have a single atom cooled to near its vibrational ground state. A
theoretical model of site occupation based on Poisson statistics agrees we
ll with the experimental results.