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Non-destructive testing of damage layers in GaAs wafers by surface acoustic waves (vol 14, pg 93, 1999)
Authors
Schneider, D
Hammer, R
Jurisch, M
Citation
D. Schneider et al., Non-destructive testing of damage layers in GaAs wafers by surface acoustic waves (vol 14, pg 93, 1999), SEMIC SCI T, 14(3), 1999, pp. 305-305
Citations number
1
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
ISSN journal
02681242 →
ACNP
Volume
14
Issue
3
Year of publication
1999
Pages
305 - 305
Database
ISI
SICI code
0268-1242(199903)14:3<305:NTODLI>2.0.ZU;2-4