Structural, optical and electrical properties of indium tin oxide thin films prepared by spray pyrolysis

Spray pyrolysis process has been used to deposit highly transparent and con ducting films of tin-doped indium oxide onto glass substrates. The electric al, structural and optical properties have been investigated as a function of various deposition parameters namely dopant concentrations, temperature and nature of substrate. The morphology of the surface as a function of the substrate temperature has been studied using atomic force microscopy. XRD has shown that deposited films are polycrystalline without second phases an d have a preferred orientation (4 0 0). Indium tin oxide layers with low re sistivity values around 4 x 10(-5) Omega cm and transmission coefficients i n the visible and near-infrared range of about 85-90% have been easily obta ined. (C) 1999 Elsevier Science B.V. All rights reserved.