The array of aligned, isolated carbon nanotubes was achieved by using chemi
cal vapor deposition catalyzed by round alloy particles on the Ag film. The
round alloy particles were prepared by annealing FeNi islands on the Ag fi
lm deposited by magnetic sputtering on the silica substrate. The size of th
e round particles was controlled by the size of the FeNi islands films and
the heat treated temperature. The array of carbon nanotubes on the Ag film
was obtained at 700 degrees C when the round alloy particles was about 30-8
0 nm in diameter. (C) 1999 Elsevier Science S.A. All rights reserved.