A new methodology was developed to obtain cubic, stabilized zirconium oxide
films prepared at room temperature. The zirconium oxide films were prepare
d electrochemically by anodic oxidation of metallic zirconium at constant c
urrent density. The oxide films were analyzed by X-ray diffraction, scannin
g electron microscopy, and X-ray photoelectron spectroscopy. The oxide film
s grown in H3PO4 solutions are monoclinic, and the ones prepared in phospho
ric acid solution containing Na-2[Ca(EDTA)] complex are cubic. An explanati
on for the zirconium oxide stabilization obtained by the electrochemical me
thod is proposed that assumes a destruction and rebuilding of the oxide fil
m during the dielectric breakdown.