Y. Okano et al., Numerical simulation of oscillatory flow in melt during InSb single crystal growth by RF heating Czochralski method, INT J N MOD, 11(6), 1998, pp. 289-298
Citations number
18
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
INTERNATIONAL JOURNAL OF NUMERICAL MODELLING-ELECTRONIC NETWORKS DEVICES AND FIELDS
Oscillatory flow present in the melt during InSb single crystal growth usin
g an RF-heating Czochralski method has been numerically investigated by mea
ns of the finite difference method using the HSMAC algorithm. The thermal b
oundary conditions required for the numerical simulation model were obtaine
d experimentally by measuring the temperature profile along the crucible of
a Czochralski system by means of thermocouples mounted in the crucible. Re
sults of numerical simulations showed that the use of a third-order upwind
discretization scheme was necessary to catch the oscillatory behaviour of t
he fluid flow in the melt. It was shown that this oscillatory behaviour str
ongly depends on the crystal rotation rate. Indeed, the oscillation period
increases when the crystal rotation rate is above a critical rotation rate.
In order to avoid such oscillations, crystal rotation rates lower than thi
s critical value of crystal rotation rate must be selected for the growth o
f high quality crystals free of striations. (C) 1998 John Wiley & Sons, Ltd
.