The simultaneous observation of X-ray reflections by a high-quality charge
coupled device (CCD) camera in a scanning electron microscope is presented.
The possibility of immediate further processing and evaluation of the imag
es by computer, avoiding the extensive photographic X-ray film procedure, i
s discussed. The divergent beam X-ray method has considerable importance fo
r investigations in materials research. The experimental set-up is describe
d and the advantageous application of the camera is demonstrated for differ
ent examples.