A novel approach for making ohmic contacts to p-type ZnSe has been introduc
ed. This approach includes growth of p-ZnSe at low temperature by a variant
of molecular beam epitaxy, then treating the surface with KOH solution, fo
llowed by deposition of a Te/Pd/Pt/Au metal layer and annealing at 200-250
degrees C for 5 min. As a result, a stable ohmic contact up to a current de
nsity of 2 kA cm(-2) was obtained. Using this contact fabrication procedure
, a ZnSe-based quantum-well laser was demonstrated in Continuous wave mode
of operation at room temperature. The formation of the ohmic contact is sug
gested to be due to the presence of oxygen on the ZnSe surface, the creatio
n of TeO2 at the metal/ZnSe interface, and the diffusion of Pd into ZnSe. (
C) 1999 American Vacuum Society. [S0734-2101(99)01102-1].