Mechanism of nitrogen removal from silicon nitride by nitric oxide

Authors
Blain, MG
Citation
Mg. Blain, Mechanism of nitrogen removal from silicon nitride by nitric oxide, J VAC SCI A, 17(2), 1999, pp. 665-667
Citations number
5
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
17
Issue
2
Year of publication
1999
Pages
665 - 667
Database
ISI
SICI code
0734-2101(199903/04)17:2<665:MONRFS>2.0.ZU;2-9