RHEED oscillations during the MBE process under the coexistence of step flow and two-dimensional nucleation growth modes

The evolution of different types of surface relief: vicinal surface with eq uidistant steps of monoatomic height and echelons of step's;singular surfac e with steps of opposite directions, and the surface with previously formed islands of monoatomic height during MBE growth was investigated by Monte C arlo simulation. Parameters of the model were chosen for the simultaneous a ppearance of two-dimensional islands creation and step flaw during the grow th process. The coexistence of these two modes leads to a decrease in RHEED oscillations period, self-organization of specific asynchronous structure of islands,:fast damping of RHEED oscillations on the vicinal surface, and to initial relief smoothening and beat-shape RHEED oscillations on the sing ular surface. Reasons of asynchronous structures formation and conditions f or teats and other distortions in RHEED oscillations were investigated.