Lattice strain relaxation in InAs/GaSb heterostructures was investigated by
x-ray diffraction. Two types of structures, grown by molecular beam epitax
y, are compared. In the first, GaSb buffer layers were grown on GaAs substr
ates, followed by 0.05-1.0 mu m thick InAs layers. In the second, InAs laye
rs were grown directly on GaSb substrates. For a given thickness, the InAs
layers retain significantly more strain when grown on GaSb substrates, refl
ecting the lower threading dislocation density in the GaSb substrates relat
ive to the GaSb buffer layers grown on GaAs. [S0003-6951(98)02251-7].