A mechanically flexible tunneling contact operating at radio frequencies

We report on a nanomachined electromechanical resonator applied as a mechan ically flexible tunneling contact. The resonator was machined out of a sing le-crystal silicon-on-insulator substrate and operates at room temperature with frequencies up to some 73 MHz, transferring electrons by mechanical mo tion. (C) 1998 American Institute of Physics. [S0003-6951(98)03651-1].