GaInAs metal-semiconductor-metal photodetectors fabricated with Cu Sch
ottky contacts on an AlInAs barrier-enhancement layer are described, T
he Cu electrodes were found to decrease by a factor of two the dark cu
rrent of large area pads compared to pads formed with Ti, illustrating
the potential for improving Schottky barriers by proper choice of met
al type. The dark current density at 10 V is 3.8 pA/mu m(2) and the re
sponse time is 17 ps.