Synthesis and stabilization of stibine for low-temperature chemical vapor deposition of carbon-free antimony films

Antimony trihydride(stibine), SbH3, and antimony trideuteride, SbD3, were s ynthesized in high yields via a unique nonaqueous synthetic route. A study comparing the relative thermal stability of SbD3 with that of SbH3 was perf ormed. Deuterated stibine displays significantly greater thermal stability than its hydride analogue due to isotopic stabilization and can be stored a t room temperature for weeks with minimal decomposition. The thermal decomp osition of SbD3 was performed at 300 degrees C in a horizontal, hot-wall ch emical vapor deposition (CVD) reactor. Decomposition efficiencies approachi ng 50% were achieved when SbD3 was delivered with H-2 as a carrier gas. As this research demonstrates, deuterated stibine is an improved CVD source du e to its gaseous nature, compositional simplicity, lack of Sb-C bonds, enha nced thermal stability, and ability to deposit Sb films at very low tempera tures.