When measured by ellipsometry: the thickness of a polymer (PolyDiMethylSilo
xane: PDMS) microscopic film deposited on a solid substrate (silicon wafer)
is shown to depend upon the exposure time and the size of the light spot.
We measured experimentally the thinning of such films. This effect can be a
non-negligible source of error in the determination of microscopic liquid
film thickness. To explain our results, we propose the existence of a Maran
goni effect which is due to a local overheating produced by light absorptio
n in the substrate. (C) Academie des sciences/Elsevier, Paris.