An intelligent supervisory system for ion implantation in IC fabrication processes

Authors
Citation
Lc. Shen et Pl. Hsu, An intelligent supervisory system for ion implantation in IC fabrication processes, CON ENG PR, 7(2), 1999, pp. 241-247
Citations number
7
Categorie Soggetti
AI Robotics and Automatic Control
Journal title
CONTROL ENGINEERING PRACTICE
ISSN journal
09670661 → ACNP
Volume
7
Issue
2
Year of publication
1999
Pages
241 - 247
Database
ISI
SICI code
0967-0661(199902)7:2<241:AISSFI>2.0.ZU;2-K
Abstract
This pager presents a real-time intelligent supervision system for IC ion i mplantation processes. A hardware interface is developed, to extract the fe atures directly from the 2-D analog image signals of a beam map. A qualitat ive model for the beam scanning is then obtained, and the symptoms of abnor mal operations can be analyzed to achieve on-line diagnosis. Furthermore, a fuzzy expert system is developed to advise operators on making appropriate adjustments for the beam scanning. This supervisory system has been implem ented on Eaten NV-6200 A/AV ion implanters at the Taiwan Semiconductor Manu facturing Company. (C) 1999 Elsevier Science Ltd. All rights reserved.