Photoelectrochemical properties of TiOx layers prepared by DC pulsed unbalanced reactive magnetron sputtering

Three sets of titanium oxide layers with different oxygen content were prep ared by DC pulsed reactive magnetron sputtering. The layers were characteri sed by their thickness, conductivity, refractive index, band-gap and flat b and potential. The photoelectric and photocatalytic activities of the layer s irradiated by Xe discharge lamp were tested in NaOH and phenol water solu tion, respectively. Rather high activity of prepared layers was found; no e xpressive activity increase was, however, observed in contrary to the expec tation connected with suboxide forms of TiOx.