DIFFUSER-ELEMENT DESIGN INVESTIGATION FOR VALVE-LESS PUMPS

Authors
OLSSON A STEMME G STEMME E
Citation
A. Olsson et al., DIFFUSER-ELEMENT DESIGN INVESTIGATION FOR VALVE-LESS PUMPS, Sensors and actuators. A, Physical, 57(2), 1996, pp. 137-143
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
57
Issue
2
Year of publication
1996
Pages
137 - 143
Database
ISI
SICI code
0924-4247(1996)57:2<137:DDIFVP>2.0.ZU;2-7
Abstract
The flow-directing properties of several micromachined diffuser elemen ts with different lengths and opening angles for valve-less micropumps have been investigated. The experimental results are compared with an alytical results. The diffuser elements are fabricated in silicon and glass using isotropic and anisotropic wet etching and anodic bonding. The lengths of the diffusers are from 1.45 to 3.95 mm and the half-ell iptic neck cross sections are about 30 mu m x 100 mu m.