Nanogrinder for high precision machining of silicon wafers

Authors
Konnemann, G Eichhorn, H Petzold, R
Citation
G. Konnemann et al., Nanogrinder for high precision machining of silicon wafers, IND DIAM RE, 59(1), 1999, pp. 30
Categorie Soggetti
Material Science & Engineering
Journal title
INDUSTRIAL DIAMOND REVIEW
ISSN journal
00198145 → ACNP
Volume
59
Issue
1
Year of publication
1999
Database
ISI
SICI code
0019-8145(1999)59:1<30:NFHPMO>2.0.ZU;2-8