Micropatterning of BiSrCaCuO thin films using excimer laser

Micropatterning of BiSrCaCuO(BSCCO) superconducting thin films has been suc cessfully accomplished by using a pulsed KrF excimer laser with a wavelengt h of lambda = 248 nm and a duration of 25 ns. The optimum energy density of the laser was 0.36 Jcm(-2) for etching of these films. For example, a supe rconducting microstructure of BSCCO film with nominally 3 mu m wide and 2 m u m long, showed no degradation in T-c and J(c). Excimer laser patterning t echnique yields reproducible patterning without any degradation of supercon ducting properties. The etching bordering and surface morphology was examin ed using an atomic force microscope.