X-ray phase-amplitude contrast mapping of single-crystal alloys near the absorption edge of the alloy impurity

An experimental-analytical method for the nondestructive structural and che mical composition mapping of single-crystal alloys is proposed, implemented , and successfully tested. The technique is based on analytical measurement s of phase and amplitude changes in a narrow polychromatic region near the absorption edge of the alloy impurity. Synchrotron radiation energies of 11 .996-11.105 keV were used to measure the Bragg diffraction profiles near th e absorption edge of germanium at 11.103 keV in SiGe/Si crystal alloy super structures. Physical dimensions and chemical composition of SiGe alloys wer e determined with a spatial resolution 8.6 Angstrom. (C) 1998 American Inst itute of Physics. [S0021-8979(98)08420-5].