We present an experimental approach to correlate optical and structural pro
perties of Si/Si1-xGex multiple quantum wells as determined by photolumines
cence (PL) and X-ray diffraction, respectively. The optical properties of t
he quantum wells were characterised by studying the dependence of luminesce
nce on temperature and excitation density. An enhanced PL yield and an incr
eased quenching temperature were observed for a sample grown at 650 degrees
C as compared to one grown at 600 degrees C. Pronounced interdiffusion acr
oss the multiple quantum well interfaces as well as significant lattice dis
tortions within the Sice layers have been observed. (C) 1999 Elsevier Scien
ce B.V. All rights reserved.