X-ray counting statistics plays a key role in establishing confidence limit
s in composition determination by X-ray microanalysis. The process starts w
ith measurements of intensity on one or more samples and standards as well
as related background determinations. Since each individual measurement is
subject to variability associated with counting statistics, it is necessary
to combine all of the counting variability according to established mathem
atical procedures. The next step is to apply propagation of error calculati
ons to equations for quantitative analysis and determine confidence limits
in reported composition. Similar concepts can also be applied to trace elem
ent determination. This approach can then be combined with spectral simulat
ion modeling, making it possible to predict detectability limits without ad
ditional measurements.