The progress in microfabrication technologies is currently characterized by
an increasing number of microproducts and corresponding efforts for cost e
ffective mass fabrication. In this context, the development and utilization
of new application specific materials has become one of the key challenges
for the commercial production of miniaturized functional units. This appli
es, in particular, to the LIGA technique, a sequence of process steps combi
ning deep lithography, microelectroforming and micromoulding, which offers
an extremely broad spectrum of materials for the generation of ultraprecise
three-dimensional microstructures. A wide variety of polymers, metals, met
al alloys and ceramic materials are by now accessible for fabricating micro
devices. There are practically no major limitations in selecting the desire
d material properties, e.g. in respect of mechanical stiffness or biocompat
ibility, optical transparency or magnetic properties, resistance against co
rrosion or whatever is required by the specific function of a microdevice.