A theoretical investigation of the dependence of gas sensitivity of nanostr
uctured semiconductor gas sensors on cluster size is presented The clusters
are represented as spheres and the adsorbed gas as a surface stare density
. The sensitivity is calculated as a change in conductivity over a change o
f surface state density. The results show that there is a critical cluster
size, which is material dependent, at which the sensitivity is maximal. The
cluster size for maximum sensitivity of several metal oxide gas sensors of
practical interest, such as ZnO, SnO2, TiO2 and In2O3, is predicted and di
scussed. (C)1999 Acta Metallurgica Inc.