Anisotropic growth is observed for GaN(0001) during molecular beam epitaxy
for both the step-flow growth mode and two-dimensional (2D) nucleation grow
th mode. Using scanning tunneling microscopy, we find that in the step-flow
growth mode, growth anisotropy strongly influences the shape of terrace ed
ges, making them strikingly different between hexagonal and cubic films. In
the 2D nucleation growth mode, anisotropic growth results in triangularly
shaped islands. The importance of understanding growth anisotropy to achiev
e better grown GaN films is discussed. [S0031-9007(99)08731-1].