Nanoscale CMOS

This paper examines the apparent limits, possible extensions, and applicati ons of CMOS technology in the nanometer regime. Starting from device scalin g theory and current industry projections, we analyze the achievable perfor mance and possible limits of CMOS technology from the point of view of devi ce physics, device technology, and power consumption. Various possible exte ntions to the basic logic and memory devices are reviewed, with emphasis on novel devices that are structurally distinct from conventional bulk CMOS l ogic and memory devices. Possible applications of nanoscale CMOS are examin ed, with a view to better defining the likely capabilities of future microe lectronic systems. This analysis covers both data processing applications a nd nondata processing applications such as RF and imaging. Finally, we spec ulate on the future of CMOS for the coming 15-20 years.