This paper examines the apparent limits, possible extensions, and applicati
ons of CMOS technology in the nanometer regime. Starting from device scalin
g theory and current industry projections, we analyze the achievable perfor
mance and possible limits of CMOS technology from the point of view of devi
ce physics, device technology, and power consumption. Various possible exte
ntions to the basic logic and memory devices are reviewed, with emphasis on
novel devices that are structurally distinct from conventional bulk CMOS l
ogic and memory devices. Possible applications of nanoscale CMOS are examin
ed, with a view to better defining the likely capabilities of future microe
lectronic systems. This analysis covers both data processing applications a
nd nondata processing applications such as RF and imaging. Finally, we spec
ulate on the future of CMOS for the coming 15-20 years.