Thermal flow sensor for liquids and gases based on combinations of two principles

Authors
Ashauer, M Glosch, H Hedrich, F Hey, N Sandmaier, H Lang, W
Citation
M. Ashauer et al., Thermal flow sensor for liquids and gases based on combinations of two principles, SENS ACTU-A, 73(1-2), 1999, pp. 7-13
Citations number
8
Categorie Soggetti
Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS A-PHYSICAL
ISSN journal
09244247 → ACNP
Volume
73
Issue
1-2
Year of publication
1999
Pages
7 - 13
Database
ISI
SICI code
0924-4247(19990309)73:1-2<7:TFSFLA>2.0.ZU;2-W
Abstract
A new type of a flow sensor is presented which is based on a thermal princi ple. The combination of two detecting methods results both in a considerabl e increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction t ime of less than 2 ms. Furthermore, the sensor is relatively insensitive to pollution. Devices were manufactured and successfully tested for liquids a nd gases. (C) 1999 Elsevier Science S.A. All rights reserved.