Diamond replicas from microstructured silicon masters

We are developing a microstructure technology for thick film diamond replic as, using deposition by hot filament chemical vapour deposition (CVD) on mi crostructured silicon. This technology is primarily intended to make microm echanical structures for microstructured carriers, fluidic cooling systems, systems for biochemical analyses and processes, and moulds for thermoplast ic and metal microstructures. With thick film deposition ridges, trenches, and capillary channels with high resolution coverage and low roughness, rms < 2 nm, were created. Demonstrator structures for microfluidic, microstruc tured carriers, and polymer moulding applications are presented. (C) 1999 E lsevier Science S.A. All rights reserved.