Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners

Authors
Schroth, A Lee, C Matsumoto, S Maeda, R
Citation
A. Schroth et al., Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners, SENS ACTU-A, 73(1-2), 1999, pp. 144-152
Citations number
6
Categorie Soggetti
Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS A-PHYSICAL
ISSN journal
09244247 → ACNP
Volume
73
Issue
1-2
Year of publication
1999
Pages
144 - 152
Database
ISI
SICI code
0924-4247(19990309)73:1-2<144:AOSDTP>2.0.ZU;2-4