SiC fabrication technology: Growth and doping

Authors
Dmitriev, VA Spencer, MG
Citation
Va. Dmitriev et Mg. Spencer, SiC fabrication technology: Growth and doping, SEM SEMIMET, 52, 1998, pp. 21-75
Citations number
231
Categorie Soggetti
Current Book Contents
Journal title
SIC MATERIALS AND DEVICES → ACNP
ISSN journal
00808784
Volume
52
Year of publication
1998
Pages
21 - 75
Database
ISI
SICI code
0080-8784(1998)52:<21:SFTGAD>2.0.ZU;2-8