Growth of yttria stabilized zirconia thin films by metallo-organic, ultrasonic spray pyrolysis

Authors
Matsuzaki, Y Hishinuma, M Yasuda, I
Citation
Y. Matsuzaki et al., Growth of yttria stabilized zirconia thin films by metallo-organic, ultrasonic spray pyrolysis, THIN SOL FI, 340(1-2), 1999, pp. 72-76
Citations number
18
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
340
Issue
1-2
Year of publication
1999
Pages
72 - 76
Database
ISI
SICI code
0040-6090(19990226)340:1-2<72:GOYSZT>2.0.ZU;2-V
Abstract
Randomly and preferentially oriented thin films of yttria stabilized zircon ia (YSZ) have been prepared on fused quartz substrates by ultrasonic spray pyrolysis using zirconium octylate and yttrium octylate as metallo-organic precursors at a substrate temperature of 873-1023 K. The as-deposited films composed of fine columnar grains were found to be crystalline and transpar ent with a cubic fluorite structure. With increasing substrate temperature the growth rate and diameter of the columnar grains increased and the cryst al habit showed a preferential orientation at the (111) plane. (C) 1999 Els evier Science S.A. All rights reserved.