Structural characterization of CxByNz (x = 0.1 to x = 0.2) layers obtainedby laser-driven synthesis

CxByNz layers have been prepared by laser-assisted chemical vapour depositi on (CVD) in a gas atmosphere containing C2H4, B2H6 and NH3 where the starti ng composition ratio could vary in a large range. The characterization of t hese C-B-N materials was made by XRD, EPMA, XPS, optical and scanning elect ron microscopy. The chemical composition of C-B-N layers tended to a compos ition C1B6N3 on the line BN-'B3C'. The turbostratic structure of C-B-N laye rs could be influenced and modified as a function of composition. XPS inves tigations confirmed the single-phase nature and the existence of bonding be tween all the elements. Some planar structures, containing especially CB2N groups, were suggested for the 'unit cell' of these C-B-N solid solutions, in agreement with EPMA and XPS analysis. (C) 1999 Elsevier Science S.A. All rights reserved.