Experimental and numerical analysis of rapid reaction to initiate the radical chain reactions in WSix CVD (vol 320, pg 151, 1998)

Authors
Chae, YK Egashira, Y Shimogaki, Y Sugawara, K Komiyama, H
Citation
Yk. Chae et al., Experimental and numerical analysis of rapid reaction to initiate the radical chain reactions in WSix CVD (vol 320, pg 151, 1998), THIN SOL FI, 340(1-2), 1999, pp. 317-317
Citations number
1
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
340
Issue
1-2
Year of publication
1999
Pages
317 - 317
Database
ISI
SICI code
0040-6090(19990226)340:1-2<317:EANAOR>2.0.ZU;2-7