INVESTIGATION OF THE EFFECT OF OXYGEN AND SUBSTRATE BIAS ON THE DEFECT STRUCTURE OF SPUTTER-DEPOSITED SNOX FILMS

Authors
NANCHEVA N DOCHEVA P HADJIJSKA P MISHEVA M DJOURELOV N ELENKOV D
Citation
N. Nancheva et al., INVESTIGATION OF THE EFFECT OF OXYGEN AND SUBSTRATE BIAS ON THE DEFECT STRUCTURE OF SPUTTER-DEPOSITED SNOX FILMS, Scripta materialia, 37(12), 1997, pp. 1957-1962
Citations number
22
Journal title
Scripta materialia → ACNP
ISSN journal
13596462
Volume
37
Issue
12
Year of publication
1997
Pages
1957 - 1962
Database
ISI
SICI code
1359-6462(1997)37:12<1957:IOTEOO>2.0.ZU;2-E