LASER CVD OF BORON-NITRIDE FILMS FROM GAS EOUS BORAZINE-AMMONIA MIXTURES

Authors
AGEEV VP KONOV VI UGAROV MV
Citation
Vp. Ageev et al., LASER CVD OF BORON-NITRIDE FILMS FROM GAS EOUS BORAZINE-AMMONIA MIXTURES, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 61(8), 1997, pp. 1596-1605
Citations number
15
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
61
Issue
8
Year of publication
1997
Pages
1596 - 1605
Database
ISI
SICI code
0367-6765(1997)61:8<1596:LCOBFF>2.0.ZU;2-Q