L. Leprince et al., OBSERVATION OF STRAIN RELAXATION PHENOMENA IN BURIED AND NONBURIED III-V SURFACE GRATINGS THROUGH HIGH-RESOLUTION X-RAY-DIFFRACTION, Applied physics letters, 71(22), 1997, pp. 3227-3229
We present high-resolution x-ray diffraction studies describing the ev
olution of the strain relaxation phenomena in a strained InGaAsP surfa
ce grating resulting from burying in InP. We have compared reciprocal
space maps of symmetrical and asymmetrical reflections from free-strai
n gratings, strained surface gratings, and strained buried gratings. A
fter burying, modifications in the coherently and diffusely scattered
intensity have been observed indicating the counteraction of the embed
ding material to the laterally nonuniform strain relaxation, which occ
urs in free-surface (nonburied) strained grating. (C) 1997 American In
stitute of Physics.