MECHANISM OF ORGANIZATION OF 3-DIMENSIONAL ISLANDS IN SIGE SI MULTILAYERS/

Authors
MATEEVA E SUTTER P BEAN JC LAGALLY MG
Citation
E. Mateeva et al., MECHANISM OF ORGANIZATION OF 3-DIMENSIONAL ISLANDS IN SIGE SI MULTILAYERS/, Applied physics letters, 71(22), 1997, pp. 3233-3235
Citations number
8
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
71
Issue
22
Year of publication
1997
Pages
3233 - 3235
Database
ISI
SICI code
0003-6951(1997)71:22<3233:MOOO3I>2.0.ZU;2-N
Abstract
Thp organization of coherent three-dimensional islands during the grow th of SiGe/Si multilayers on Si(100) was investigated with cross-secti onal transmission electron microscopy. Merging of islands of different initial size is found to be the dominant mechanism leading to a unifo rm size distribution. Upon overgrowth with Si, we observe a change of the shape of the islands from the {105}-faceted ''hut'' to a boxlike s hape bounded on top by a (100) facet. (C) 1997 American Institute of P hysics.