DESIGN, FABRICATION AND TESTING OF MICROLENS ARRAYS FOR SENSORS AND MICROSYSTEMS

Authors
NUSSBAUM P VOLKE R HERZIG HP EISNER M HASELBECK S
Citation
P. Nussbaum et al., DESIGN, FABRICATION AND TESTING OF MICROLENS ARRAYS FOR SENSORS AND MICROSYSTEMS, Pure and applied optics, 6(6), 1997, pp. 617-636
Citations number
40
Journal title
Pure and applied optics → ACNP
ISSN journal
09639659
Volume
6
Issue
6
Year of publication
1997
Pages
617 - 636
Database
ISI
SICI code
0963-9659(1997)6:6<617:DFATOM>2.0.ZU;2-T
Abstract
We report on our activities in design, fabrication, characterization a nd system integration of refractive microlens arrays for sensors and m icrosystems. Examples for chemical analysis systems (mu TAS, blood gas sensor), neural networks and multiple pupil imaging systems for photo lithography (microlens and smart mask lithography) are presented.