PERFORMANCE ANALYSIS OF A RADIOFREQUENCY INDUCTION PLASMA GENERATOR USING NONLINEAR STATE-SPACE APPROACH

A free-running induction plasma generator was numerically simulated us ing an iterative nonlinear state-space method. The reflected resistanc e of the radio-frequency induction-coupled plasma (RF-ICP), together w ith its inductance, were extracted from a two-dimensional (2-D) model of RF-ICP and were represented in the generator circuit model as an eq uivalent resistor and inductor. Matching of the generator's operating condition with that of the RF-ICP was achieved iteratively. The model is able to predict local plasma conditions, coupling efficiency, and t he steady-state output signals of the generator. The model can serve a s a design tool for the induction plasma generator.