EFFECTS OF OXIDE ELECTRODE ON PBZRXTI1-XO3 THIN-FILMS PREPARED BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION

The effect of the RuOx/Pt multilayer electrode on the microstructure a nd ferroelectric properties of PbZrxTi1-xO3 (x=0.52) prepared by metal organic chemical vapor deposition (MOCVD) were studied, The variation of RuOx thickness resulted in changes in the RuOx surface morphology, These modifications of RuOx surfaces caused changes in the texture, su rface morphology and ferroelectric properties of lead zirconate titana te (PZT) thin films deposited on the multilayer electrodes. The improv ements in the ferroelectric properties were attributed to the altered microstructure. Remanent polarization (P-r) and coercive voltage (V-c) of the multilayer PZT capacitors were estimated to be 22 mu C/cm(2) a nd 0.7V at 5 V: respectively, The multilayer PZT capacitors did not de grade up to 10(12) cycles at 2V. In this study, the factors of the dep osition of PZT on RuOx/Pt multilayer electrode by MOCVD were investiga ted and the integration process of the Pt/RuOx/PZT/RuOx/Pt capacitor w as also discussed.