COMPUTER STUDIES OF DEPTH PROFILES DUE TO CARBON FULLERENE IMPACTS ONA TID2 TARGET

We studied the depth profile due to carbon fullerene impacts on a TiD2 target, using the time-evolution Monte Carlo code DYACAT. Simulations have been performed for incident energies per atom of 100 eV-5 keV, a nd for the clusters (C)(N) (N = 30-240) and a monatomic ion. In the ca se of the lower energy cluster bombardment, the projected range of car bon fullerenes is larger than that of monatomic ions; because the clus ter atoms in the lower part of the cluster clear the way for the subse quent cluster atoms. In the higher cluster energy region, the projecte d range is smaller than that of monatomic ions, because the initial ve locity of the cluster atoms is randomized due to collisions of a clust er atom with a cluster atom or a moving target atom. The cluster effec t of the projected range is determined by the competition process of t he clearing-the way effect and the cluster-enhanced randomization effe ct.