Long-term operation of TeO2 acousto-optical device is limited by the f
ormation of surface damage caused by the He Cd laser irradiation. Simi
lar surface damage occurs during the heat treatment of the TeO2 crysta
l at 350 degrees C. In this study, TeO2 specimens after various surfac
e treatments have been observed by electron microscopy and X-ray photo
electron spectroscopy. The variation of the transmittance for mechanic
ally polished specimens has been measured in situ during heat treatmen
ts. It was found that the thermal surface damage at 350 degrees C was
formed in the surface layer damaged by mechanical polishing. The mecha
nically damaged layer was amorphous and deficient in oxygen in the as-
polished state. The electron microscopic observation revealed that the
surface damage layer induced by heat treatments or by the ultraviolet
light irradiation contained tellurium particles (20-40 nm) in diamete
r dispersed in the TeO2 matrix. On annealing the TeO2 specimen at 500
degrees C in air, however, the particles disappeared because of the me
lting, evaporation and oxidation of tellurium which restores the trans
mittance of the crystal. Based on the results, combined with the obser
vation of surface damage induced by the visible light irradiation, a p
ossible mechanism of the surface damage formation has been briefly dis
cussed.