We discuss the influence of temperature on local bond breaking through
multiple vibrational excitations induced by inelastic tunneling in th
e STM. We focus on hydrogen desorption from the H-Si(lll) and H-Si(100
) systems, but the results are general. The substrate temperature affe
cts the desorption yield in two important ways: first, lowering the te
mperature increases the H-Si vibrational energy relaxation time, resul
ting in a higher effective adsorbate temperature and an increased deso
rption yield. Second, lowering the substrate temperature decreases the
dephasing rate of the H-Si modes (manifested by a decrease of the inf
rared absorption linewidth), which then reduces the rate of incoherent
(Forster) vibrational energy transfer away from the Stark-shifted K-S
i mode under the tip. This increases the localization of the vibration
al energy and enhances the probability for multiple vibrational excita
tion and desorption. Finally, we discuss the possible implications of
our findings on the mechanism of MOS device degradation by hot electro
ns. (C) 1997 Elsevier Science B.V.