THE EFFECT OF GAS ATMOSPHERE ON FLIGHT VELOCITIES OF PARTICLES IN LASER SPUTTERING OF SOLID TARGETS

Expansion of vapor from YBa2Cu3O7-x, PbTe(Ga), and Sn(Cu) targets evap orated by nanosecond laser radiation into argon or oxygen atmosphere w as studied by electrostatic probe and optical emission spectroscopy te chniques. It was shown that there were two fluxes of charged species a t a gas pressure in the range 2.7-13.3 Pa: the low-velocity flux of el ectrons and ions scattered on gas molecules and the high-velocity flux of unscattered particles. The dependence of intensities and velocitie s of these fluxes of particles on radiation power density, gas pressur e, and atomic mass of ions was studied.