MICROFABRICATED LAMB WAVE DEVICE BASED ON PZT SOL-GEL THIN-FILM FOR MECHANICAL TRANSPORT OF SOLID PARTICLES AND LIQUIDS

The fabrication using silicon micromachining and characterization of a n acoustic Lamb wave actuator is presented. The intended use of the de vice is for mass transport and sensor applications. The device consist s of dual interdigitated transducers patterned on a thin-film composit e membrane of silicon nitride, platinum, and a sol-gel-derived piezoel ectric ceramic (PZT) thin film, The acoustic properties of the device are presented along with preliminary applications to mechanical transp ort and liquid delivery systems. Improved acoustic signals and improve d mass transport are achieved with PZT over present Lamb wave devices utilizing ZnO or AlN as the piezoelectric transducer.